Busch Vacuum Pumps and Systems will be presenting efficient and reliable solutions for the semiconductor industry at Semicon West 2017, held July 11-13, 2017, at the Moscone Center in San Francisco, California.
At this year’s Semicon West we will be highlighting the energy efficiency and reliability of our vacuum solutions for the semiconductor industry. This is especially the case with our large range of COBRA Semicon dry screw vacuum pumps and our latest COBRA, the COBRA BC 0101 G. Based on contact-free dry screw technology, our COBRA Semicon dry screw vacuum pumps offer very high levels of energy efficiency and process stability.
Versions of the COBRA Semicon series type include DS (the industrial standard, gas-tight, conventional bearing system), BA (gas-tight, flying bearing system, air cooled) and BC (gas-tight, flying bearing system, water cooled). All of these are specially designed for complex applications within the semiconductor industry.
Our COBRA series of dry screw vacuum pumps is ideal for load-lock chambers in semiconductor processing to prevent contamination, physical vapour deposition (PVD), metrology, semiconductor etching and other semiconductor applications.
Visitors to our booth can also learn more about our Fossa dry scroll vacuum pumps, which are ideally suited for generating high vacuum in load lock or transfer chambers, helium leak detectors, mass spectrometers, electron microscopes and other analytical devices.
In addition to providing efficient and reliable vacuum pumps and systems, we offer a range of services – including field service, training and remanufacturing – performed by highly qualified technicians to optimize the efficiency of operations.
Our new facility in Austin, Texas, is equipped and operates with state-of-the-art equipment and processes that offer single piece flow re-manufacturing.
Our number one priority is to best support our customers with both our products and service capabilities. Our new facility is designed to provide a quality of service to our medium and high vacuum customers that is now even higher
We operate a global service network to maintain vacuum equipment and have local service centers worldwide, enabling rapid-response service for all Busch vacuum pumps and systems installed throughout the world. Busch service technicians have extensive experience based on the servicing of thousands of pumps and are supported by the knowledge and expertise of our service network. In addition to supporting our own installed equipment, we can restore all types and brands of vacuum pumps, blowers and compressors to near-new condition with improved performance capacity.
This will be our fifth straight year participating in Semicon West, which has grown to over 600 exhibitors and offers 115 hours of planned educational programs and networking opportunities.
For more information, visit www.buschvacuum.com